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Low-cost MEMS fabrication technology using a replica molding technique

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Researchers at the National Institute of Advanced Industrial Science and Technology (AIST), have developed a microelectromechanical systems (MEMS) device fabrication technology that uses only printing and injection molding. This has been achieved by integrating the microfabrication technology and the MEMS design evaluation technology of AIST. A lighting device has been fabricated by combining the signal processing technology of Design Tech Co., Ltd. with the developed technology.

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